An Annular Mechanical Temperature Compensation Structure for Gas-Sealed Capacitive Pressure Sensor
نویسندگان
چکیده
منابع مشابه
An Annular Mechanical Temperature Compensation Structure for Gas-Sealed Capacitive Pressure Sensor
A novel gas-sealed capacitive pressure sensor with a temperature compensation structure is reported. The pressure sensor is sealed by Au-Au diffusion bonding under a nitrogen ambient with a pressure of 100 kPa and integrated with a platinum resistor-based temperature sensor for human activity monitoring applications. The capacitance-pressure and capacitance-temperature characteristics of the ga...
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ژورنال
عنوان ژورنال: Sensors
سال: 2012
ISSN: 1424-8220
DOI: 10.3390/s120608026